Analysis Range: Element K~U. Multiple layers are able to be analyzed simultaneously. The accurate of thickness measurement is 10nm. More than 5 layers can be analyzed simultaneously. Independent matrix effect correction models. Most advanced thickness analysis recipes. Repeatability is up to 10nm. Long-period Working Stability and feasibility is lower than 10nm.
Configurations:
Open sample chamber 3-D movement is realized by 2-D movable platform and up-and-down movement of detector and x-ray tube. Double-laser positioning system. Automatic collimator switch Glass shield cap Electronic circuit for signal detection High and low voltage power supply Electro-cooling Si-Pin semiconductor detector instead of liquid nitrogen cooling ones X-ray tube PC and ink-jet printer Sample chamber: 20X14X5In (517mmx352mmx150mm) Machine Dimension: 26X19X21In (648mmx490mmx544mm)
Safety
(1) The shield cover of the instrument has interlocks with high voltage of X-tube. When the cover is open, the X-ray tube is shut down to prevent X rays from leaking outside. (2) The up-and-down movable glass shield can help to prevent the radiation of X-Rays away from operator. (3) The X-ray tube has interlocks with software, the tube is shut down when the software is not running.